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Requirement Specification

TPS (short)
TPS(短)

GENERIC TOOL AND PROCESS SPECIFICATION
通用工具和工藝規範

Automatic Packaging machine for HWS
HWS 自動包裝

Horizontal Wafer Shipper
水平晶圓運輸商

Title: Automatic Packaging machine for HWS

Confidentiality

Document Number:

Revision:

1

Date:

Page/Pages

Restricted

????

2024-010-12

4/12

Copyright © Infineon Technologies AG 2016. All rights reserved Printed/ copied version may be obsolete; please note current online version.

Requirement Specification
需求規格

Table of Content
目錄

1Technical Requirements3
1技術要求3

1.1General Description3
1.1一般說明3

1.2Process Requirements3
1.2工藝要求3

1.3Material Description3
1.3材質說明3

1.4Process Results4
1.4處理結果4

2Equipment Configuration4
2設備配置4

2.1General demands4
2.1一般要求4

2.2Environmental Requirements4
2.2環境要求4

2.3Ergonomics4
2.3人體工程學4

2.4Safety5
2.4治理5

2.5Wirings, Cables & Hoses Specifications5
2.5布線、電纜和軟管規格5

2.6Alarm/ Warning5
2.6警報/警告5

2.7Clean Room Equipment requirements:5
2.7潔凈室設備要求:5

2.8Equipment Hardware Configurations5
2.8設備硬體配置5

3Conflict Resolution6
3衝突解決6

4Terms and Definitions6
4術語和定義6

5Installation and Service Support7
5安裝和服務支援7

6Abbreviations8
6縮略語8

Title: Automatic Packaging machine for HWS
名稱:HWS 自動包裝機

Confidentiality
保密性

Document Number:
檔案編號:

Revision:
校訂:

1

Date:
日期:

Page/Pages
頁/頁

Restricted
限制

????

2024-010-12

4/12

Copyright © Infineon Technologies AG 2016. All rights reserved Printed/ copied version may be obsolete; please note current online version.
版權所有 © Infineon Technologi esAG 2016。保留所有權利 印刷/複製版本可能已過時;請注意當前的在線版本。

Requirement Specification
需求規格

Technical Requirements
技術要求

General Description
一般描述

The basic function of the tool is to perform a good quality MBB (moisture barrier bag) Vacuum Sealing in preprogrammed manner Equipment must be compatible with SEMI standard shipment boxes HWS & Moisture Barrier Bags for vacuum sealing.
該工具的基本功能是以預程式設計的方式執行高品質的MBB(防潮袋)真空封口設備必須與SEMI標準運輸箱HWS和 防潮袋真空封口相容。

This specification defines the requirements and acceptance criteria of Infineon (IFX) for the supplier to comply in providing the equipment mentioned. In addition to this, the supplier-published specification shall also apply when agreed by both parties.
本規範定義了英飛淩 (IFX) 的要求和驗收標準,供供應商在提供上述設備時遵守。除此之外,供應商發佈的規範在雙方同意的情況下也應適用。

This specification is a minimum requirement. A detailed specification and further documents will be defined after completion of the Technical Assessment.
此規範是最低要求。完成技術評估后,將定義詳細的規範和進一步的檔。

Process Requirements
工藝要求

Host Interface
主機介面

Scanning RFID Tag and read out
掃描 RFID 標籤讀出

Printing BarcodeProductLabel (BPL)
列印條碼ProductLabel (BPL)

Attaching the BPL to the HWS (Horizontal Wafer Shipper)
將 BPL 連接到 HWS(水平晶圓運輸器

Attach desiccant to the HWS
將乾燥劑連接到 HWS

Place HWS in Moisture Barrier Bags (MBB)
將 HWS 放入防潮袋 (MBB) 中

N2 (nitrogen) flow in the MBB
MBB 中的 N2(氮氣)流量

Seals of the MBB
MBB 的密封件

Fix the corners of the MBB
修復 MBB 的邊角

Attaching the BPL of the MBB
附加 MBB 的 BPL

scan barcode of the BPL
掃描 BPL 的條碼

Job End/MVOU
作業結束/MVOU

Shipping process
發貨流程

Material Description
材料描述

Wafer Size
晶圓尺寸

diameter: 300mm
直徑:300mm

Shipment Box Types
貨件箱類型

300mm Entegris Box HWS
300mm Entegris 箱式 HWS

HWS300-101A-61C02M

300mm ePAK Box HWS
300 毫米 ePAK 箱式硬體

ePAK eCT-LX12_300-4-44

Dimensions HWS (L/B/H): 342 / 342 / 74 ± 0,5
尺寸S HWS (L/B/H): 342 / 342 / 74 ± 0,5

for mor details see spec from the manufacturer
有關 MOR 的詳細資訊,請參閱製造商的規格

* samples will be provided
* 將提供樣品

Sealing Bags
密封袋

Moisture Barrier Bags 550x650 for HWS
用於 HWS防潮袋 550x65 0

for mor details see spec from the manufacturer
F或 MOR 詳細資訊 請參閱製造商規格

* samples will be provided
* 將提供樣品

Process Results
進程 Results

no vacuum leaks on the sealing area
密封區域無真空洩漏

no MBB defects contributed by the any of the machine parts
任何機器部件都不存在 MBB 缺陷

must be free of wrinkles, foreign matter, fat, discoloration or excess moisture
沒有皺紋、異物、脂肪變色或水分過多

continuous and bubble-free sealing seam
連續且無氣泡的密封接縫

seal cannot be separated by hand pressure
Seal 不能用手壓分離

must have: maximum residual oxygen <1% inside the sealed MBB
必須具有:密封 MBB 內的最大殘氧量 <1%
,

no MBB residues on the surface of sealing bar
密封表面n o MBB 殘留物

Equipment Configuration
設備配置

General demands
一般要求

2.1.1

Equipment has to be of modular construction to facilitate installation, troubleshooting and maintenance
設備必須採用模組化結構,以便於安裝、故障排除和維護

2.1.2

Equipment electrical controller module must be constructed for maintenance easy access & service, should not locate inside the equipment chassis which has narrow & hard to access area.
設備電氣控制器模組必須構造以便於維護和服務,不應位於設備機箱內部,因為設備機箱區域狹窄且難以接近。

2.1.3

All sources of equipment vibration will be suitably dampened; any foundation requirement must provide the specification and inform IFX ahead upon PO released.
所有設備振動源都將得到適當的阻尼;任何基礎需求都必須提供規範,並在PO發佈時提前通知IFX。

2.1.4

The equipment must fulfil CE compliance and must be certified through official authentic proof. A “CE” conformity sticker has to be marked visible on the tool.
設備必須符合 CE 標準,並且必須通過官方真實證明進行認證。必須在工具上標明“CE”合格標籤。

Environmental Requirements
環境要求

2.2.1

The machine and the Supplier shall fulfil the “Directive 2012/19/EU on waste electrical and electronic equipment (WEEE)” and “Directive 2011/65/EU Restriction of Hazardous Substances in Electrical and Electronic Equipment (RoHS)”.
機器和供應商應滿足「關於廢棄電氣和電子設備 (WEEE) 的指令 2012/19/EU“和”指令 2011/65/EU 電氣和電子設備中有害物質限制 (RoHS)“。

2.2.2

Structure-borne sound transmission on floor and buildings shall be minimized as far as possible. The sound power level shall be less than 70 dB (A).
應盡可能減少地板和建築物的結構雜訊傳播。聲功率級應小於 70 dB (A)。

2.2.3

The system shall be able to work in the cleanroom environment. (ISO6) Refer also to TGTS
系統應能夠在潔凈室環境中工作 (ISO6)另請參閱 TGTS
.

2.2.4

Equipment must not generate any particles, oil mist escapes or leaks from the equipment during equipment operation or idling.
設備在設備運行或怠速期間不得產生任何顆粒、油霧逸出或從設備中洩漏。

Ergonomics
人類工程學

2.3.1

The equipment shall be designed under the premises of ergonomics. Ergonomics of any monitor screen or keyboard/panel locations shall take into account machine operation, logistics and the average height of people.
設備的設計應符合人體工程學。任何顯示器螢幕或鍵盤/面板位置的人體工程學都應考慮機器操作、物流和人員的平均身高。

2.3.3

The machine shall provide a graphical user interface in English and German. The language shall be selectable
機器應提供英語和德語的圖形用戶介面。語言應可選擇
.

2.3.4

In order to assist Infineon’s operation staff during operation of the machine the graphical user interface contains a help function, explaining main features, e.g. handling and maintenance instructions, important parts of the user interface
為了在機器操作期間説明英飛淩的操作人員,圖形使用者介面包含説明功能,解釋主要功能,例如操作和維護說明、用戶介面的重要部分
.

2.3.5

The machine software provides an operator level as well as an engineering/maintenance level. The access to the engineering/maintenance level is protected
機器軟體提供操作員級別以及工程/維護級別。對 engineering/maintenance 級別的訪問受到保護
.

Safety
安全

Some European standards, to which conformity may be declared:
一些可以聲明符合的歐洲標準:

EN ISO 12100
EN ISO 12100 標準

The basic concept and design principle (in former times EN 292)
基本概念和設計原則(以前稱為 EN 292)

EN ISO 13849
EN ISO 13849 標準

Safety of machinery - Safety-related parts of control systems - Part1: General principles for design
機械安全 - 控制系統的安全相關部件 - 第 1 部分:設計的一般原則

EN ISO 13857
EN ISO 13857 標準

Safety of machinery - Safety distances to prevent danger zones being reached by the upper limbs
機械安全 - 安全距離,防止上肢到達危險區域

EN ISO 13854
EN ISO 13854 標準

Safety of machinery - Minimum gaps to avoid crushing of parts of the human body
機械安全 - 最小的間隙,以避免壓碎人體的某些部位

EN ISO 7731
EN ISO 7731 標準

Safety of Machinery - Auditory Danger Signals - General Requirements, Design and Testing
機械安全 - 聽覺危險信號 - 一般要求、設計和測試

EN ISO 13732
EN ISO 13732 標準

Touchable surface temperature
可觸摸表面溫度

EN 60204
EN 60204 標準

Machinery, electrical machines
機械、電機

EN ISO 10218-1
EN ISO 10218-1 標準

Industrial robots
工業機器人

Wirings, Cables & Hoses Specifications
佈線、電纜和軟管規格

2.5.1

All wires, cables, tubes, air hoses and other connections within the tool must be clearly marked/label in English on both ends and on the equipment itself with an appropriate mark corresponding to the schematics or diagrams included with the product documentation.
工具內的所有電線、電纜、管子、空氣軟管和其他連接必須在兩端和設備本身用英文清楚地標記/標籤,並帶有與產品文檔中包含的原理圖或圖表相對應的適當標記。

2.5.2

Ensure that all high voltage connections (≥48V) are shielded.
確保所有高壓連接 (≥48V) 都已遮罩。

2.5.3

Cables will be run in metal or plastic ducts. Flexible ducts should be used where applicable, and cables will be capable of repeatable bending (strain relieved). Power cables and signal cables will be run in separate ducts
電纜將在金屬或塑膠管道中運行。在適用的情況下,應使用柔性管道,並且電纜將能夠重複彎曲(應力消除)。電源線和信號線將在單獨的管道中運行
.

2.5.4

Cables & air hoses must be high temp compatible where required
電纜和空氣軟管必須在需要時與高溫相容

Alarm/ Warning
警報/警告

2.6.1

The visual alarm signal shall be to alert the operator when equipment needs user intervention and clearly visible to the operator.
視覺警報信號應在設備需要用戶干預時提醒操作員,並且操作員可以清楚地看到。

Clean Room Equipment requirements:
潔淨室設備要求:

2.7.1

This topic is described in the TGTS. Required ISO6
本主題 TGTS 要求的 ISO6 中進行了描述

Equipment Hardware Configurations
設備硬體配置

Equipment Housing
設備外殼

equipment with stainless steel chamber and housing
不鏽鋼 C籃和 Housing 的 E 裝置

no sharp edges or pointed parts
沒有鋒利的邊緣或尖銳的 par ts

with viewing window in the lid
蓋子上有觀察窗

all sides and the underside of the system must be closed
系統的 AL 側面和底部必須閉合

there must be no moving parts outside the housing
外殼外部不得有活動部件

side covers must be easily removable and lockable
側蓋必須易於拆卸和鎖定

system with ESD protection
帶ESD保護的系統

equipment on lockable stainless-steel castors
E配備可鎖定的不鏽鋼腳輪

Ergonomic & comfortable Safe Operation
人體工程學&舒適 安全操作

Incorporating a SEMI-compliant design, equipment should design for ergonomic, comfortable and safe
設備採用符合 SEMI 的設計,設計應符合人體工程學、舒適和安全

Equipment Control
設備控制

automatic process control of all important process parameters (SECS/GEM), E23 interface for HERO
所有重要工藝參數 (SECS/GEM)自動過程控制,用於 HER O 的 E23 介面

Control Panel Display
控制面板顯示

touch screen display
觸摸屏顯示

must be attached to the front
必須安裝在前面

N2 Gas Flushing
N2 充氣

integrated sensor for N2 gas flow
I集成N 2 氣體流量感測器

Sealing Bar
密封條

sealing process with integrated temperature control
集成溫度控制的密封過程

Sealing Time
密封時間

programmable sealing time via recipe

Conflict Resolution
衝突解決

Should there be any conflicting requirements in this specification, between this specification and any other specification or agreement, or between any other specifications or agreements relating to this equipment, IFX and Supplier should mutually work together to resolve the conflict.
如果本規範中、本規範與任何其他規範或協定之間、或與本設備相關的任何其他規範或協定之間存在任何衝突要求,IFX 和供應商應共同解決衝突。

Terms and Definitions
術語和定義

Equipment Uptime
設備正常運行時間

Uptime is the average relative measure of the equipment availability for which it will perform its intended function within the time frame of an effective production period and will be calculated as follows.
正常運行時間是設備可用性的平均相對衡量標準,它將在有效生產期間的時間範圍內執行其預期功能,計算如下。

Uptime % = (Total Time – Down Time) / Total Time * 100
正常執行時間 % =(總時間 – 停機時間)/總時間 * 100

Total Time will be the effective time for the period in which the equipment was utilized. This time does not include any waiting time, idling time, break time, etc. or any other time, within this utilization period, that the equipment was stopped without reason to repair, adjust, etc. or of that it could perform its intended function. However, downtime that is defined below will be included.
Total Time 將是設備使用期間的生效時間。該時間不包括任何等待時間、怠速時間、休息時間等,以及在此使用期間內,設備在沒有維修、調整等原因的情況下停止或無法發揮其預期功能的任何其他時間。但是,將包括下面定義的停機時間。

Down Time will be the period for which the equipment is not in a condition or is not available to perform its intended function.
停機時間是設備不處於狀態或無法執行其預期功能的時間。

Equipment Reliability
設備可靠性

Equipment Reliability is the probability that the equipment will perform its intended function within the stated condition for a specified period of time, and is established as follows.
設備可靠性是指設備在規定時間內在規定條件下執行其預期功能的概率,其確定方式如下。

MTBF (Mean Time Between Failure)
MTBF (平均故障間隔時間)

A failure is defined as when the equipment cannot normally process units and a technician is required to bring the equipment back into working order. Therefore failures are usually assumed to be of long duration i.e. greater than 3 minutes. Time is expressed in hours. This model regards "Time Between" as the time that the equipment is actually running, not including any downtimes.
故障定義為設備無法正常處理設備,並且需要技術人員使設備恢復工作狀態。因此,通常假定故障持續時間較長,即超過 3 分鐘。時間以小時表示。此模型將 「Time Between」 視為設備實際運行的時間,不包括任何停機時間。

MTBF = (Production run per period) / (Total no. of failures in that period)
MTBF =(每個期間的生產運行數)/(該期間的故障總數)

The measure of MTBF corresponds proportionately to MTTR.
MTBF 的度量與 MTTR 成正比。

Equipment Reliability is the probability that the equipment will perform its intended function within the stated condition for a specified period of time, and is established as follows.
設備可靠性是指設備在規定時間內在規定條件下執行其預期功能的概率,其確定方式如下。

Equipment Maintainability
設備可維護性

Equipment Maintainability is the probability that the equipment will be retained in or restored to a condition where it can perform its intended function within a specified period, and are established as follows.
設備可維護性是指設備在規定時間內保持或恢復到能夠執行其預期功能的狀態的可能性,其確定方式如下。

MTTR (Mean Time To Repair)
MTTR (平均修復時間)

This is defined as the mean time to correct a failure and bring the equipment back to production condition.
這被定義為糾正故障並使設備恢復到生產狀態的平均時間。

MTTR = (Total repair time per period) / (Total no. of failures in that period)
MTTR =(每個週期的總修復時間)/(該週期內的故障總數)

Installation and Service Support
安裝和服務支援

5.1Equipment shall be packed securely in crate with sufficient dampening material to prevent shipping damages. Shock and tilt detectors shall be adhered to inside and outside of crate.
5.1 設備應安全地包裝在板條箱中,並採用足夠的阻尼材料,以防止運輸損壞。衝擊和傾斜探測器應粘附在板條箱的內部和外部。

5.2The supplier is responsible for setting up the equipment and performs the Final Acceptance at IFX premises, total duration in maximum 4 weeks. The service support will remain on site until all equipment & process specifications are fully met.
5.2 供應商負責在 IFX 場所設置設備並執行最終驗收,總持續時間最長為 4 周。服務支援將留在現場,直到所有設備和流程規格完全滿足。

5.3Supplier will train or supervise/assist in the execution of the monthly, semi-yearly or/and yearly PM’s during the warranty period at no cost to IFX.
5.3 供應商將在保修期內培訓或監督/協助執行月度、半年或/和年度 PM,IFX 無需支付任何費用。

5.4When tool breakdown or technical supports are needed, supplier must provide the on call service support or/and on-site support. Respond time by phone is 4 hours on the average (not to exceed one working day) and to be on-site support on the same day or the next day latest during weekdays from 09:30am-17:30pm.
5.4 當需要工具故障或技術支援時,供應商必須提供隨叫隨到的服務支援或/和現場支援。電話回應時間平均為 4 小時(不超過一個工作日),工作日上午 09:30 至下午 17:30 最遲在同一天或第二天提供現場支援。

5.5If local Service Engineer failed to settle the problem after 24hours, he should escalate to higher level of support from supplier site. The supplier to provide the escalation plan to customer on next day.
5.5 如果當地服務工程師在24小時後未能解決問題,他應該從供應商現場升級到更高級別的支援。供應商在第二天向客戶提供升級計劃。

5.6High failure Parts and Critical Spare should be kept in nearest supplier site to IFX and should be able to retrieve the parts within 24 hour.
5.6 高故障零件和關鍵備件應存放在離 IFX 最近的供應商地點,並應能夠在 24 小時內取回零件。

5.7Facilities Requirement
5.7 設施要求

Vendor shall confirm the complete machine facility requirements with lnfineon at least 6 weeks before machine delivery.
供應商應在機器交付前至少 6 周與萊飛淩確認整機設施要求。

All facilities connector point shall be at the rear of the equipment.
所有設施連接點均應位於設備的後部。

Power Supply: 400 to 415 VAC Three-Phase 50/60Hz.
電源:400 至 415 VAC 三相 50/60Hz。

Abbreviations
縮寫

MBB (moisture barrier bag)
MBB(防潮袋)

FTP (file transfer protocol)
FTP(檔案傳輸協定)

CE (Conformite Europeenne)
CE (Conformite Europeenne

SEMI (Semiconductor Equipment and Materials International)
SEMI (國際半導體設備和材料協會)

EMO (emergency machine off)
EMO(緊急機器關閉)

PO (purchase order)
PO (採購訂單)

CDA (compressed dry air)
CDA(壓縮乾燥空氣)

TPS (technical process specification)
TPS(技術工藝規範)

TGTS (Technical General Tender Specification)
TGTS (技術通用招標規範)

NCL (noncompliance list)
NCL(不合規清單)

Desiccant
乾燥劑

Packing box
包裝盒