TPS (short)
TPS（短）
GENERIC TOOL AND PROCESS SPECIFICATION
通用工具和工藝規範
Automatic Packaging machine for HWS
HWS 自動包裝機
“Horizontal Wafer Shipper”
“水平晶圓運輸商”
Requirement Specification |
Requirement Specification |
Table of Content
目錄
1 Technical Requirements 3
1技術要求3
1.1 General Description 3
1.1一般說明3
1.2 Process Requirements 3
1.2工藝要求3
1.3 Material Description 3
1.3材質說明3
2 Equipment Configuration 4
2設備配置4
2.2 Environmental Requirements 4
2.2環境要求4
2.5 Wirings, Cables & Hoses Specifications 5
2.5布線、電纜和軟管規格5
2.7 Clean Room Equipment requirements: 5
2.7潔凈室設備要求：5
2.8 Equipment Hardware Configurations 5
2.8設備硬體配置5
4 Terms and Definitions 6
4術語和定義6
5 Installation and Service Support 7
5安裝和服務支援7
Requirement Specification |
Technical Requirements
技術要求
General Description
一般描述
The basic function of the tool is to perform a good quality MBB (moisture barrier bag) Vacuum Sealing in preprogrammed manner Equipment must be compatible with SEMI standard shipment boxes HWS & Moisture Barrier Bags for vacuum sealing.
該工具的基本功能是以預程式設計的方式執行高品質的MBB（防潮袋）真空封口設備必須與SEMI標準運輸箱HWS和 防潮袋真空封口相容。
This specification defines the requirements and acceptance criteria of Infineon (IFX) for the supplier to comply in providing the equipment mentioned. In addition to this, the supplier-published specification shall also apply when agreed by both parties.
本規範定義了英飛淩 （IFX） 的要求和驗收標準，供供應商在提供上述設備時遵守。除此之外，供應商發佈的規範在雙方同意的情況下也應適用。
This specification is a minimum requirement. A detailed specification and further documents will be defined after completion of the Technical Assessment.
此規範是最低要求。完成技術評估后，將定義詳細的規範和進一步的檔。
Process Requirements
工藝要求
Host Interface
主機介面
Scanning RFID Tag and read out
掃描 RFID 標籤並讀出
Printing BarcodeProductLabel (BPL)
列印條碼ProductLabel （BPL）
Attaching the BPL to the HWS (Horizontal Wafer Shipper)
將 BPL 連接到 HWS（水平晶圓運輸器）
Attach desiccant to the HWS
將乾燥劑連接到 HWS
Place HWS in Moisture Barrier Bags (MBB)
將 HWS 放入防潮袋 （MBB） 中
N2 (nitrogen) flow in the MBB
MBB 中的 N2（氮氣）流量
Seals of the MBB
MBB 的密封件
Fix the corners of the MBB
修復 MBB 的邊角
Attaching the BPL of the MBB
附加 MBB 的 BPL
scan barcode of the BPL
掃描 BPL 的條碼
Job End/MVOU
作業結束/MVOU
Shipping process
發貨流程
Material Description
材料描述
Wafer Size | diameter: 300mm |
Shipment Box Types | 300mm Entegris Box HWS HWS300-101A-61C02M 300mm ePAK Box HWS ePAK eCT-LX12_300-4-44 Dimensions HWS (L/B/H): 342 / 342 / 74 ± 0,5 for mor details see spec from the manufacturer * samples will be provided |
Sealing Bags
| Moisture Barrier Bags 550x650 for HWS for mor details see spec from the manufacturer * samples will be provided |
Process Results
進程 Results
no vacuum leaks on the sealing area
密封區域無真空洩漏
no MBB defects contributed by the any of the machine parts
任何機器部件都不存在 MBB 缺陷
must be free of wrinkles, foreign matter, fat, discoloration or excess moisture
沒有皺紋、異物、脂肪、變色或水分過多
continuous and bubble-free sealing seam
連續且無氣泡的密封接縫
seal cannot be separated by hand pressure
Seal 不能用手壓分離
must have: maximum residual oxygen <1% inside the sealed MBB
必須具有：密封 MBB 內的最大殘氧量 <1%,
no MBB residues on the surface of sealing bar
密封條表面有 n o MBB 殘留物
Equipment Configuration
設備配置
General demands
一般要求
2.1.1 | Equipment has to be of modular construction to facilitate installation, troubleshooting and maintenance |
2.1.2 | Equipment electrical controller module must be constructed for maintenance easy access & service, should not locate inside the equipment chassis which has narrow & hard to access area. |
2.1.3 | All sources of equipment vibration will be suitably dampened; any foundation requirement must provide the specification and inform IFX ahead upon PO released. |
2.1.4 | The equipment must fulfil CE compliance and must be certified through official authentic proof. A “CE” conformity sticker has to be marked visible on the tool. |
Environmental Requirements
環境要求
2.2.1 | The machine and the Supplier shall fulfil the “Directive 2012/19/EU on waste electrical and electronic equipment (WEEE)” and “Directive 2011/65/EU Restriction of Hazardous Substances in Electrical and Electronic Equipment (RoHS)”. |
2.2.2 | Structure-borne sound transmission on floor and buildings shall be minimized as far as possible. The sound power level shall be less than 70 dB (A). |
2.2.3 | The system shall be able to work in the cleanroom environment. (ISO6) Refer also to TGTS |
2.2.4 | Equipment must not generate any particles, oil mist escapes or leaks from the equipment during equipment operation or idling. |
Ergonomics
人類工程學
2.3.1 | The equipment shall be designed under the premises of ergonomics. Ergonomics of any monitor screen or keyboard/panel locations shall take into account machine operation, logistics and the average height of people. |
2.3.3 | The machine shall provide a graphical user interface in English and German. The language shall be selectable |
2.3.4 | In order to assist Infineon’s operation staff during operation of the machine the graphical user interface contains a help function, explaining main features, e.g. handling and maintenance instructions, important parts of the user interface |
2.3.5 | The machine software provides an operator level as well as an engineering/maintenance level. The access to the engineering/maintenance level is protected |
Safety
安全
Some European standards, to which conformity may be declared:
一些可以聲明符合的歐洲標準：
EN ISO 12100 | The basic concept and design principle (in former times EN 292) |
EN ISO 13849 | Safety of machinery - Safety-related parts of control systems - Part1: General principles for design |
EN ISO 13857 | Safety of machinery - Safety distances to prevent danger zones being reached by the upper limbs |
EN ISO 13854 | Safety of machinery - Minimum gaps to avoid crushing of parts of the human body |
EN ISO 7731 | Safety of Machinery - Auditory Danger Signals - General Requirements, Design and Testing |
EN ISO 13732 | Touchable surface temperature |
EN 60204 | Machinery, electrical machines |
EN ISO 10218-1 | Industrial robots |
Wirings, Cables & Hoses Specifications
佈線、電纜和軟管規格
2.5.1 | All wires, cables, tubes, air hoses and other connections within the tool must be clearly marked/label in English on both ends and on the equipment itself with an appropriate mark corresponding to the schematics or diagrams included with the product documentation. |
2.5.2 | Ensure that all high voltage connections (≥48V) are shielded. |
2.5.3 | Cables will be run in metal or plastic ducts. Flexible ducts should be used where applicable, and cables will be capable of repeatable bending (strain relieved). Power cables and signal cables will be run in separate ducts |
2.5.4 | Cables & air hoses must be high temp compatible where required |
Alarm/ Warning
警報/警告
2.6.1 | The visual alarm signal shall be to alert the operator when equipment needs user intervention and clearly visible to the operator. |
Clean Room Equipment requirements:
潔淨室設備要求：
2.7.1 | This topic is described in the TGTS. Required ISO6 |
Equipment Hardware Configurations
設備硬體配置
Equipment Housing | equipment with stainless steel chamber and housing no sharp edges or pointed parts with viewing window in the lid all sides and the underside of the system must be closed there must be no moving parts outside the housing side covers must be easily removable and lockable system with ESD protection equipment on lockable stainless-steel castors |
Ergonomic & comfortable Safe Operation | Incorporating a SEMI-compliant design, equipment should design for ergonomic, comfortable and safe |
Equipment Control | automatic process control of all important process parameters (SECS/GEM), E23 interface for HERO |
Control Panel Display | touch screen display must be attached to the front |
N2 Gas Flushing | integrated sensor for N2 gas flow |
Sealing Bar | sealing process with integrated temperature control |
Sealing Time | programmable sealing time via recipe |
Conflict Resolution
衝突解決
Should there be any conflicting requirements in this specification, between this specification and any other specification or agreement, or between any other specifications or agreements relating to this equipment, IFX and Supplier should mutually work together to resolve the conflict.
如果本規範中、本規範與任何其他規範或協定之間、或與本設備相關的任何其他規範或協定之間存在任何衝突要求，IFX 和供應商應共同解決衝突。
Terms and Definitions
術語和定義
Equipment Uptime
設備正常運行時間
Uptime is the average relative measure of the equipment availability for which it will perform its intended function within the time frame of an effective production period and will be calculated as follows.
正常運行時間是設備可用性的平均相對衡量標準，它將在有效生產期間的時間範圍內執行其預期功能，計算如下。
Uptime % = (Total Time – Down Time) / Total Time * 100
正常執行時間 % =（總時間 – 停機時間）/總時間 * 100
Total Time will be the effective time for the period in which the equipment was utilized. This time does not include any waiting time, idling time, break time, etc. or any other time, within this utilization period, that the equipment was stopped without reason to repair, adjust, etc. or of that it could perform its intended function. However, downtime that is defined below will be included.
Total Time 將是設備使用期間的生效時間。該時間不包括任何等待時間、怠速時間、休息時間等，以及在此使用期間內，設備在沒有維修、調整等原因的情況下停止或無法發揮其預期功能的任何其他時間。但是，將包括下面定義的停機時間。
Down Time will be the period for which the equipment is not in a condition or is not available to perform its intended function.
停機時間是設備不處於狀態或無法執行其預期功能的時間。
Equipment Reliability
設備可靠性
Equipment Reliability is the probability that the equipment will perform its intended function within the stated condition for a specified period of time, and is established as follows.
設備可靠性是指設備在規定時間內在規定條件下執行其預期功能的概率，其確定方式如下。
MTBF (Mean Time Between Failure)
MTBF （平均故障間隔時間）
A failure is defined as when the equipment cannot normally process units and a technician is required to bring the equipment back into working order. Therefore failures are usually assumed to be of long duration i.e. greater than 3 minutes. Time is expressed in hours. This model regards "Time Between" as the time that the equipment is actually running, not including any downtimes.
故障定義為設備無法正常處理設備，並且需要技術人員使設備恢復工作狀態。因此，通常假定故障持續時間較長，即超過 3 分鐘。時間以小時表示。此模型將 「Time Between」 視為設備實際運行的時間，不包括任何停機時間。
MTBF = (Production run per period) / (Total no. of failures in that period)
MTBF =（每個期間的生產運行數）/（該期間的故障總數）
The measure of MTBF corresponds proportionately to MTTR.
MTBF 的度量與 MTTR 成正比。
Equipment Reliability is the probability that the equipment will perform its intended function within the stated condition for a specified period of time, and is established as follows.
設備可靠性是指設備在規定時間內在規定條件下執行其預期功能的概率，其確定方式如下。
Equipment Maintainability
設備可維護性
Equipment Maintainability is the probability that the equipment will be retained in or restored to a condition where it can perform its intended function within a specified period, and are established as follows.
設備可維護性是指設備在規定時間內保持或恢復到能夠執行其預期功能的狀態的可能性，其確定方式如下。
MTTR (Mean Time To Repair)
MTTR （平均修復時間）
This is defined as the mean time to correct a failure and bring the equipment back to production condition.
這被定義為糾正故障並使設備恢復到生產狀態的平均時間。
MTTR = (Total repair time per period) / (Total no. of failures in that period)
MTTR =（每個週期的總修復時間）/（該週期內的故障總數）
Installation and Service Support
安裝和服務支援
5.1 Equipment shall be packed securely in crate with sufficient dampening material to prevent shipping damages. Shock and tilt detectors shall be adhered to inside and outside of crate.
5.1 設備應安全地包裝在板條箱中，並採用足夠的阻尼材料，以防止運輸損壞。衝擊和傾斜探測器應粘附在板條箱的內部和外部。
5.2 The supplier is responsible for setting up the equipment and performs the Final Acceptance at IFX premises, total duration in maximum 4 weeks. The service support will remain on site until all equipment & process specifications are fully met.
5.2 供應商負責在 IFX 場所設置設備並執行最終驗收，總持續時間最長為 4 周。服務支援將留在現場，直到所有設備和流程規格完全滿足。
5.3 Supplier will train or supervise/assist in the execution of the monthly, semi-yearly or/and yearly PM’s during the warranty period at no cost to IFX.
5.3 供應商將在保修期內培訓或監督/協助執行月度、半年或/和年度 PM，IFX 無需支付任何費用。
5.4 When tool breakdown or technical supports are needed, supplier must provide the on call service support or/and on-site support. Respond time by phone is 4 hours on the average (not to exceed one working day) and to be on-site support on the same day or the next day latest during weekdays from 09:30am-17:30pm.
5.4 當需要工具故障或技術支援時，供應商必須提供隨叫隨到的服務支援或/和現場支援。電話回應時間平均為 4 小時（不超過一個工作日），工作日上午 09：30 至下午 17：30 最遲在同一天或第二天提供現場支援。
5.5 If local Service Engineer failed to settle the problem after 24hours, he should escalate to higher level of support from supplier site. The supplier to provide the escalation plan to customer on next day.
5.5 如果當地服務工程師在24小時後未能解決問題，他應該從供應商現場升級到更高級別的支援。供應商在第二天向客戶提供升級計劃。
5.6 High failure Parts and Critical Spare should be kept in nearest supplier site to IFX and should be able to retrieve the parts within 24 hour.
5.6 高故障零件和關鍵備件應存放在離 IFX 最近的供應商地點，並應能夠在 24 小時內取回零件。
5.7 Facilities Requirement
5.7 設施要求
Vendor shall confirm the complete machine facility requirements with lnfineon at least 6 weeks before machine delivery.
供應商應在機器交付前至少 6 周與萊飛淩確認整機設施要求。
All facilities connector point shall be at the rear of the equipment.
所有設施連接點均應位於設備的後部。
Power Supply: 400 to 415 VAC Three-Phase 50/60Hz.
電源：400 至 415 VAC 三相 50/60Hz。
Abbreviations
縮寫
MBB (moisture barrier bag)
MBB（防潮袋）
FTP (file transfer protocol)
FTP（檔案傳輸協定）
CE (Conformite Europeenne)
CE （Conformite Europeenne）
SEMI (Semiconductor Equipment and Materials International)
SEMI （國際半導體設備和材料協會）
EMO (emergency machine off)
EMO（緊急機器關閉）
PO (purchase order)
PO （採購訂單）
CDA (compressed dry air)
CDA（壓縮乾燥空氣）
TPS (technical process specification)
TPS（技術工藝規範）
TGTS (Technical General Tender Specification)
TGTS （技術通用招標規範）
NCL (noncompliance list)
NCL（不合規清單）
Desiccant
乾燥劑
Packing box
包裝盒