这项工作得到了空军科学研究办公室 (MURI, grant FA9550-14-1-0389)、Charles Stark Draper Laboratory, Inc. (SC001-0000000959) 和 Thorlabs Inc. 的部分支持。WTC 感谢台湾科学技术部 (104-2917-I-564-058) 的博士后奖学金支持。RCD 得到了 Charles Stark Draper 奖学金的支持。AY 感谢哈佛大学约翰 A. 保尔森工程与应用科学学院和新加坡 A*STAR 国家科学奖学金计划。制造工作在 NSF 支持的哈佛纳米系统中心进行。我们感谢 E. 胡 的超连续谱激光器 (NKT “SuperK”)。
Monticone F., Estakhri N. M., and Alù A., Full control of nanoscale optical transmission with a composite metascreen. Phys. Rev. Lett.110, 203903 (2013).
Fattal D., Li J., Peng Z., Fiorentino M., and Beausoleil R. G., Flat dielectric grating reflectors with focusing abilities. Nat. Photonics4, 466–470 (2010).
Aieta F., Kats M. A., Genevet P., and Capasso F., Multiwavelength achromatic metasurfaces by dispersive phase compensation. Science347, 1342–1345 (2015).
Khorasaninejad M., Aieta F., Kanhaiya P., Kats M. A., Genevet P., Rousso D., and Capasso F., Achromatic metasurface lens at telecommunication wavelengths. Nano Lett.15, 5358–5362 (2015).
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Liu S., Sinclair M. B., Mahony T. S., Jun Y. C., Campione S., Ginn J., Bender D. A., Wendt J. R., Ihlefeld J. F., Clem P. G., Wright J. B., and Brener I., Optical magnetic mirrors without metals. Optica1, 250–256 (2014).
Rogers E. T., Lindberg J., Roy T., Savo S., Chad J. E., Dennis M. R., and Zheludev N. I., A super-oscillatory lens optical microscope for subwavelength imaging. Nat. Mater.11, 432–435 (2012).
Sun S., Yang K. Y., Wang C. M., Juan T. K., Chen W. T., Liao C. Y., He Q., Xiao S., Kung W. T., Guo G. Y., Zhou L., and Tsai D. P., High-efficiency broadband anomalous reflection by gradient meta-surfaces. Nano Lett.12, 6223–6229 (2012).
Aieta F., Genevet P., Kats M. A., Yu N., Blanchard R., Gaburro Z., and Capasso F., Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces. Nano Lett.12, 4932–4936 (2012).
Chen W. T., Yang K. Y., Wang C. M., Huang Y. W., Sun G., Chiang I. D., Liao C. Y., Hsu W. L., Lin H. T., Sun S., Zhou L., Liu A. Q., and Tsai D. P., High-efficiency broadband meta-hologram with polarization-controlled dual images. Nano Lett.14, 225–230 (2014).
Khorasaninejad M. and Capasso F., broadband multifunctional efficient meta-gratings based on dielectric waveguide phase shifters. Nano Lett.15, 6709–6715 (2015).
High A. A., Devlin R. C., Dibos A., Polking M., Wild D. S., Perczel J., de Leon N. P., Lukin M. D., and Park H., Visible-frequency hyperbolic metasurface. Nature522, 192–196 (2015).
This work was supported in part by the Air Force Office of Scientific Research (MURI, grant FA9550-14-1-0389), Charles Stark Draper Laboratory, Inc. (SC001-0000000959), and Thorlabs Inc. W.T.C. acknowledges postdoctoral fellowship support from the Ministry of Science and Technology, Taiwan (104-2917-I-564-058). R.C.D. is supported by a Charles Stark Draper Fellowship. A.Y.Z. thanks Harvard John A. Paulson School of Engineering and Applied Sciences and A*STAR Singapore under the National Science Scholarship scheme. Fabrication work was carried out in the Harvard Center for Nanoscale Systems, which is supported by the NSF. We thank E. Hu for the supercontinuum laser (NKT “SuperK”).
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Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging.Science352,1190-1194(2016).DOI:10.1126/science.aaf6644
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Ultracompact Multimode Meta-Microscope Based on Both Spatial and Guided-Wave Illumination, Advanced Devices & Instrumentation, 4, (2023)./doi/10.34133/adi.0023
(A) Schematic of the metalens and its building block, the TiO2 nanofin. (B) The metalens consists of TiO2 nanofins on a glass substrate. (C and D) Side and top views of the unit cell showing height H, width W, and length L of the nanofin, with unit cell dimensions S × S. (E) The required phase is imparted by rotation of the nanofin by an angle θnf, according to the geometric Pancharatnam-Berry phase. (F) Simulated polarization conversion efficiency as a function of wavelength. This efficiency is defined as the fraction of the incident circularly polarized optical power that is converted to transmitted optical power with opposite helicity. For these simulations, periodic boundary conditions are applied at the x and y boundaries and perfectly matched layers at the z boundaries. For the metalens designed at λd = 660 nm (red curve), nanofins have W = 85, L = 410, and H = 600 nm, with center-to-center spacing S = 430 nm. For the metalens designed at λd = 532 nm (green curve), nanofins have W = 95, L = 250, and H = 600 nm, with center-to-center spacing S = 325 nm. For the metalens designed at λd = 405 nm (blue curve), nanofins have W = 40, L = 150, and H = 600 nm, with center-to-center spacing S = 200 nm. (G) Optical image of the metalens designed at the wavelength of 660 nm. Scale bar, 40 μm. (H) SEM micrograph of the fabricated metalens. Scale bar, 300 nm.
Fig. 2 Diffraction-limited focal spots of three metalenses (NA = 0.8) and comparison with a commercial state-of-the-art objective.
(A to C) Measured focal spot intensity profile of the metalens designed at (A) λd = 660, (B) λd = 532, and (C) λd = 405 nm. (D to F) Measured focal spot intensity profiles of the objective (100× Nikon CFI 60, NA = 0.8) at wavelengths of (D) 660, (E) 532, and (F) 405 nm. (G to I) Corresponding vertical cuts of the metalenses’ focal spots. Metalenses designed at wavelengths of 660, 532, and 405 nm have FWHMs = 450, 375, and 280 nm, respectively. The symmetric beam profiles and diffraction-limited focal spot sizes are related to the quality of the fabricated metalenses and accuracy of the phase realization. (J to L) Corresponding vertical cuts of the focal spots of the objective, at wavelengths of (J) 660, (K) 532, and (L) 405 nm. FWHMs of the focal spots are labeled on the plots. These values are ~1.5 times as large as those measured for the metalenses.
(A) Measured focusing efficiency of the metalenses designed at wavelengths of 660 nm and 532 nm. (B) Intensity distribution in dB of the x-z plane, showing the evolution of the beam from 20 μm before and 20 μm after the focus. This measurement was performed on the metalens designed at λd = 532 nm. The wavelength of incident light was 532 nm.
Fig. 4 Imaging with a metalens designed at λd = 532 nm with diameter D = 2 mm and focal length f = 0.725 mm.
(A) Image of 1951 USAF resolution test chart formed by the metalens taken with a DSLR camera. Laser wavelength is set at 530 nm. Scale bar, 40 μm. (B to E) Images of the highlighted region in Fig. 4A at wavelengths of (B) 480, (C) 530, (D) 590, and (E) 620 nm. Scale bar, 5 μm. (F to I) Images of the highlighted region in Fig. 4A at a center wavelength of 530 nm and with different bandwidths: (F) 10, (G) 30, (H) 50, and (I) 100 nm. Scale bar, 5 μm. (J) Nanoscale target prepared by FIB. The smallest gap between neighboring holes is ~800 nm. (K) Image of target object (Fig. 4J) formed by the metalens. (L) Image of target object formed by the commercial state-of-the-art objective. Scale bar, 10 μm in Fig. 4, J to L. (M) Image formed by the metalens shows that holes with subwavelength gaps of ~450 nm can be resolved. Scale bar, 500 nm.
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Monticone F., Estakhri N. M., and Alù A., Full control of nanoscale optical transmission with a composite metascreen. Phys. Rev. Lett.110, 203903 (2013).
Fattal D., Li J., Peng Z., Fiorentino M., and Beausoleil R. G., Flat dielectric grating reflectors with focusing abilities. Nat. Photonics4, 466–470 (2010).
Aieta F., Kats M. A., Genevet P., and Capasso F., Multiwavelength achromatic metasurfaces by dispersive phase compensation. Science347, 1342–1345 (2015).
Khorasaninejad M., Aieta F., Kanhaiya P., Kats M. A., Genevet P., Rousso D., and Capasso F., Achromatic metasurface lens at telecommunication wavelengths. Nano Lett.15, 5358–5362 (2015).
Chong K. E., Staude I., James A., Dominguez J., Liu S., Campione S., Subramania G. S., Luk T. S., Decker M., Neshev D. N., Brener I., and Kivshar Y. S., Polarization-independent silicon metadevices for efficient optical wavefront control. Nano Lett.15, 5369–5374 (2015).
Arbabi A., Horie Y., Ball A. J., Bagheri M., and Faraon A., Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays. Nat. Commun.6, 7069 (2015).
Yang Y., Wang W., Moitra P., Kravchenko I. I., Briggs D. P., and Valentine J., Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation. Nano Lett.14, 1394–1399 (2014).
Spinelli P., Verschuuren M. A., and Polman A., Broadband omnidirectional antireflection coating based on subwavelength surface Mie resonators. Nat. Commun.3, 692 (2012).
Liu S., Sinclair M. B., Mahony T. S., Jun Y. C., Campione S., Ginn J., Bender D. A., Wendt J. R., Ihlefeld J. F., Clem P. G., Wright J. B., and Brener I., Optical magnetic mirrors without metals. Optica1, 250–256 (2014).
Rogers E. T., Lindberg J., Roy T., Savo S., Chad J. E., Dennis M. R., and Zheludev N. I., A super-oscillatory lens optical microscope for subwavelength imaging. Nat. Mater.11, 432–435 (2012).
Sun S., Yang K. Y., Wang C. M., Juan T. K., Chen W. T., Liao C. Y., He Q., Xiao S., Kung W. T., Guo G. Y., Zhou L., and Tsai D. P., High-efficiency broadband anomalous reflection by gradient meta-surfaces. Nano Lett.12, 6223–6229 (2012).
Aieta F., Genevet P., Kats M. A., Yu N., Blanchard R., Gaburro Z., and Capasso F., Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces. Nano Lett.12, 4932–4936 (2012).
Chen W. T., Yang K. Y., Wang C. M., Huang Y. W., Sun G., Chiang I. D., Liao C. Y., Hsu W. L., Lin H. T., Sun S., Zhou L., Liu A. Q., and Tsai D. P., High-efficiency broadband meta-hologram with polarization-controlled dual images. Nano Lett.14, 225–230 (2014).
Khorasaninejad M. and Capasso F., broadband multifunctional efficient meta-gratings based on dielectric waveguide phase shifters. Nano Lett.15, 6709–6715 (2015).
High A. A., Devlin R. C., Dibos A., Polking M., Wild D. S., Perczel J., de Leon N. P., Lukin M. D., and Park H., Visible-frequency hyperbolic metasurface. Nature522, 192–196 (2015).
(A) Schematic of the metalens and its building block, the TiO2 nanofin. (B) The metalens consists of TiO2 nanofins on a glass substrate. (C and D) Side and top views of the unit cell showing height H, width W, and length L of the nanofin, with unit cell dimensions S × S. (E) The required phase is imparted by rotation of the nanofin by an angle θnf, according to the geometric Pancharatnam-Berry phase. (F) Simulated polarization conversion efficiency as a function of wavelength. This efficiency is defined as the fraction of the incident circularly polarized optical power that is converted to transmitted optical power with opposite helicity. For these simulations, periodic boundary conditions are applied at the x and y boundaries and perfectly matched layers at the z boundaries. For the metalens designed at λd = 660 nm (red curve), nanofins have W = 85, L = 410, and H = 600 nm, with center-to-center spacing S = 430 nm. For the metalens designed at λd = 532 nm (green curve), nanofins have W = 95, L = 250, and H = 600 nm, with center-to-center spacing S = 325 nm. For the metalens designed at λd = 405 nm (blue curve), nanofins have W = 40, L = 150, and H = 600 nm, with center-to-center spacing S = 200 nm. (G) Optical image of the metalens designed at the wavelength of 660 nm. Scale bar, 40 μm. (H) SEM micrograph of the fabricated metalens. Scale bar, 300 nm.
Fig. 2 Diffraction-limited focal spots of three metalenses (NA = 0.8) and comparison with a commercial state-of-the-art objective.
(A to C) Measured focal spot intensity profile of the metalens designed at (A) λd = 660, (B) λd = 532, and (C) λd = 405 nm. (D to F) Measured focal spot intensity profiles of the objective (100× Nikon CFI 60, NA = 0.8) at wavelengths of (D) 660, (E) 532, and (F) 405 nm. (G to I) Corresponding vertical cuts of the metalenses’ focal spots. Metalenses designed at wavelengths of 660, 532, and 405 nm have FWHMs = 450, 375, and 280 nm, respectively. The symmetric beam profiles and diffraction-limited focal spot sizes are related to the quality of the fabricated metalenses and accuracy of the phase realization. (J to L) Corresponding vertical cuts of the focal spots of the objective, at wavelengths of (J) 660, (K) 532, and (L) 405 nm. FWHMs of the focal spots are labeled on the plots. These values are ~1.5 times as large as those measured for the metalenses.
(A) Measured focusing efficiency of the metalenses designed at wavelengths of 660 nm and 532 nm. (B) Intensity distribution in dB of the x-z plane, showing the evolution of the beam from 20 μm before and 20 μm after the focus. This measurement was performed on the metalens designed at λd = 532 nm. The wavelength of incident light was 532 nm.
Fig. 4 Imaging with a metalens designed at λd = 532 nm with diameter D = 2 mm and focal length f = 0.725 mm.
(A) Image of 1951 USAF resolution test chart formed by the metalens taken with a DSLR camera. Laser wavelength is set at 530 nm. Scale bar, 40 μm. (B to E) Images of the highlighted region in Fig. 4A at wavelengths of (B) 480, (C) 530, (D) 590, and (E) 620 nm. Scale bar, 5 μm. (F to I) Images of the highlighted region in Fig. 4A at a center wavelength of 530 nm and with different bandwidths: (F) 10, (G) 30, (H) 50, and (I) 100 nm. Scale bar, 5 μm. (J) Nanoscale target prepared by FIB. The smallest gap between neighboring holes is ~800 nm. (K) Image of target object (Fig. 4J) formed by the metalens. (L) Image of target object formed by the commercial state-of-the-art objective. Scale bar, 10 μm in Fig. 4, J to L. (M) Image formed by the metalens shows that holes with subwavelength gaps of ~450 nm can be resolved. Scale bar, 500 nm.
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